Silane is like Methane, but with Silicon instead of Carbon (SiH4). Thanks god for doping was used Phosphine (PH3) and not Phosgene (COCl2), both are nasty, but

Silane is like Methane, but with Silicon instead of Carbon (SiH4). Thanks god for doping was used Phosphine (PH3) and not Phosgene (COCl2), both are nasty, but the second is more. Plus I don't know how much is used, since nowadays doping is typically done by ion implantation rather than gas diffusion