Still, ASML's latest EUV machine, the 3600D, does draw 1.3 megawatts. https://www.sec.gov/Archives/edgar/data/937966/000093796622000013/asml-20211231.htm https

Still, ASML's latest EUV machine, the 3600D, does draw 1.3 megawatts. https://www.sec.gov/Archives/edgar/data/937966/000093796622000013/asml-20211231.htm https://www.sec.gov/Archives/edgar/data/937966/0000937966220... But when it comes to cost, evidently replacing many passes and other complicated processes with DUV machines with fewer EUV passes is a net win. And the energy required to create these chips must be a small fraction of the energy they will use in their lifetimes, so improved efficiency of the smaller nodes enabled by EUV would surely be a win, all else being equal.