Optics and photoresist materials too. The partnership developed the first EUV lithography in 2001: https://www.llnl.gov/article/27641/euvl-partnership-makes-its

Optics and photoresist materials too. The partnership developed the first EUV lithography in 2001: https://www.llnl.gov/article/27641/euvl-partnership-makes-its-stand https://www.llnl.gov/article/27641/euvl-partnership-makes-it...