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I have one! Any idea if the PZT cubes are added using the typical photoresist masking/etching or are they placed on die using some other process?
by jaygreco 2y ago
I have one! Any idea if the PZT cubes are added using the typical photoresist masking/etching or are they placed on die using some other process?
- kens 2y agoFrom looking at various patents, I believe they put down a layer of PZT and then etch it into cubes with photolithography. Look at the process diagram at the bottom of my article, step 1128.